In our paper, we demonstrate the fabrication of micron-wide superconducting nanowire single-photon detectors with a direct laser lithography. This patterning method offers a fast and rapid prototyping of devices and can be used for all types of integrated components in lithium niobate. We were able to show a saturated internal detection efficiency for detectors with an unfolded length of up to 4 mm showing the potential for patterning large areas for detector arrays.
The paper is available at:
https://doi.org/10.1088/1361-6668/ac5338
