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Equipment: Nanopatterning

Nanopatterning doctor blade

Deposition of self-organized colloidal nanosphere masks on solid surfaces by moving a droplet
Doctor blade apparatus:
- Movable substrate holder
- Peltier sample table with adjustable temperature
- Glove box with dry gas inlet
- Temperature and humidity control
- Adjustable inclination angle of the blade
- In situ observation with a light microscope
- PC control


Inclination dryer

Deposition of self-organized nanosphere masks by controlled drying of colloidal suspensions
- heatable and coolable sample table
- controlled gas environment
- selectable substrate inclination angle
- in-situ process control


Dip coater

Patterning of complex shaped surfaces
- PC-controlled deposition velocity
- flexible setup


Spin coater

Liquid-phase deposition of polymers and varnish
- Rotation speed 20 - 100 rps



Liquid phase exchange of colloidal suspensions
- Track etch filter with selectable pore size
- Inert gas operation
- electric conductivity measurement


Optical mask inspection system

Automatic Determination of mono- and double layer area fractions as well as domain sizes
- image sequences
- for masks up to 10 x 10 cm2
- PC control of sample table and data acquisition
- in-situ modification of mask openings


Prof. Dr. Jörg Lindner

Nanopatterning - Nanoanalysis - Photonic Materials


Jörg Lindner
+49 5251 60-2748
+49 5251 60-3247

The University for the Information Society