Jeol JEM-2000FX

- Acceleration voltage: 80 - 200 kV
- Thermionic electron source (currently tungsten)
- Point resolution ~0.3 nm
- Specimen holder: Single tilt holder, 2 specimens, max. tilt +/- 30°
- Energy dispersive X-ray spectroscopy system: EDAX with Be window
- FastScan CCD camera (TVIPS)
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Scan­ning elec­tron mi­cro­scopy

Jeol JSM-6060
- Tungsten hairneedle emitter
- Acceleration voltage: 0.2 - 30 kV
- Detector for secondary electrons
- EDAX-EDX for elemental analysis with Si drift detector (SDD) for elements above atomic number 5
- 131 eV resolution
- point measurement; linescan; mapping

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Jeol JSM-6300F

- Field emitter
- Acceleration voltage: 0.2 - 30 kV
- Detectors for secondary and backscattered electrons
- Point Electronic scan control and data acquisition unit
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Scan­ning probe mi­cro­scopy

Digital Instruments: Dimension 3100

- Sample size 150 mm x 12 mm
- Stage movement x, y 150 mm with 2 µm resolution
- Video optics with zoom 150-675 µm viewing area
- Piezo scan head range; 90 µm in x, y and 6 µm in z
- 16 bits DAC giving sub nanometer resolution
- Max. 512 x 512 samples/image
- Contact and tapping mode AFM
- Conductivity mapping

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X-ray pho­to­elec­tron spec­tro­scopy (XPS)

Kratos XSAM 800 (under construction)

- X-ray radiation: Mg-Ka, Al-Ka
- Monochromator for Al-Ka -> Energy width (FWHM)=0.3eV
- Vacuum system: prepump, turbo pump, ion getter pump, 2 Titan sublimation pumps; residual pressure: 10-8...10-10 Torr
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