Sie haben Javascript deaktiviert!
Sie haben versucht eine Funktion zu nutzen, die nur mit Javascript möglich ist. Um sämtliche Funktionalitäten unserer Internetseite zu nutzen, aktivieren Sie bitte Javascript in Ihrem Browser.

Info-Icon This content is partly available in English
Show image information
Show image information
Show image information
Show image information
Show image information
Nanostrukturierung - Nanoanalytik - Photonische Materialien
Prof. Dr. Jörg Lindner

Equipment: Microscopy and spectroscopy

Transmission electron microscopy

JEOL JEM-ARM200F: Cs-corrected highest resolution field emission TEM/STEM
- Acceleration voltage: 30 - 200 kV
- Cold field emitter
- Probe Cs corrector with aberration correction up to 5th order (CEOS ASCOR)
- TEM point resolution: 0.19 nm, information limit: 0.11 nm
- STEM point resolution: 0.08 nm at 200 kV, ≤  0.20 nm at 30 kV
- Energy resolution ≤ 0.30 eV (FWHM ZLP)
- 4k x 4k CMOS camera (Gatan OneView)
- 2k x 2k CCD camera (Gatan UltraScan)
- STEM BF, ABF, DF and HAADF detectors
- 8-fold segmented STEM DF detector for differential phase contrast imaging
- Energy dispersive X-ray spectroscopy system with SDD detektor (JEOL)
- Post column energy filter for EELS, dual EELS and EFTEM (Gatan GIF Quantum ER)
- Single tilt, high tilt and analytic double tilt specimen holders

Jeol JEM-2000FX
- Acceleration voltage: 80 - 200 kV
- Thermionic electron source (currently tungsten)
- Point resolution ~0.3 nm
- Specimen holder: Single tilt holder, 2 specimens, max. tilt +/- 30°
- Energy dispersive X-ray spectroscopy system: EDAX with Be window
- FastScan CCD camera (TVIPS)


Scanning electron microscopy

Jeol JSM-6060
- Tungsten hairneedle emitter
- Acceleration voltage: 0.2 - 30 kV
- Detector for secondary electrons
- EDAX-EDX for elemental analysis with Si drift detector (SDD) for elements above atomic number 5
- 131 eV resolution
- point measurement; linescan; mapping

Jeol JSM-6300F
- Field emitter
- Acceleration voltage: 0.2 - 30 kV
- Detectors for secondary and backscattered electrons
- Point Electronic scan control and data acquisition unit


Scanning probe microscopy

Digital Instruments: Dimension 3100

- Sample size 150 mm x 12 mm
- Stage movement x, y 150 mm with 2 µm resolution
- Video optics with zoom 150-675 µm viewing area
- Piezo scan head range; 90 µm in x, y and 6 µm in z
- 16 bits DAC giving sub nanometer resolution
- Max. 512 x 512 samples/image
- Contact and tapping mode AFM
- Conductivity mapping

X-ray photoelectron spectroscopy (XPS)

Kratos XSAM 800 (under construction)
- X-ray radiation: Mg-Ka, Al-Ka
- Monochromator for Al-Ka -> Energy width (FWHM)=0.3eV
- Vacuum system: prepump, turbo pump, ion getter pump, 2 Titan sublimation pumps; residual pressure: 10-8...10-10 Torr


Prof. Dr. Jörg Lindner

Nanopatterning - Nanoanalysis - Photonic Materials


Jörg Lindner
+49 5251 60-2748
+49 5251 60-3247

The University for the Information Society