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Thursday, 06.07.2023 | 16.15 to 17.45 h

Physikalisches Kolloqui­um: Op­tics for EUV litho­graphy en­abling high-end and mi­cro-elec­tron­ics

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Dr. Hartmut Enkisch
Carl Zeiss SMT GmbH
Optics for EUV lithography enabling high-end and micro-electronics

Department of Physics

Warburger Str. 100
33098 Paderborn
Germany

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(0)5251 60 2679

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physik@upb.de
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